Structural and X-Ray Photoelectron Spectroscopy Study of Al-Doped Zinc-Oxide Thin Films
Joint Authors
Jeong, Jin
Lee, Bong Ju
Song, Ho Jun
Source
Advances in Materials Science and Engineering
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-03-15
Country of Publication
Egypt
No. of Pages
5
Abstract EN
Al-doped zinc-oxide (AZO) thin films were prepared by RF magnetron sputtering at different oxygen partial pressures and substrate temperatures.
The charge-carrier concentrations in the films decreased from 1.69 × 1021 to 6.16 × 1017 cm−3 with increased gas flow rate from 7 to 21 sccm.
The X-ray diffraction (XRD) patterns show that the (002)/(103) peak-intensity ratio decreased as the gas flow rate increased, which was related to the increase of AZO thin film disorder.
X-ray photoelectron spectra (XPS) of the O1s were decomposed into metal oxide component (peak A) and the adsorbed molecular oxygen on thin films (peak B).
The area ratio of XPS peaks (A/B) was clearly related to the stoichiometry of AZO films; that is, the higher value of A/B showed the higher stoichiometric properties.
American Psychological Association (APA)
Lee, Bong Ju& Song, Ho Jun& Jeong, Jin. 2015. Structural and X-Ray Photoelectron Spectroscopy Study of Al-Doped Zinc-Oxide Thin Films. Advances in Materials Science and Engineering،Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1053650
Modern Language Association (MLA)
Lee, Bong Ju…[et al.]. Structural and X-Ray Photoelectron Spectroscopy Study of Al-Doped Zinc-Oxide Thin Films. Advances in Materials Science and Engineering No. 2015 (2015), pp.1-5.
https://search.emarefa.net/detail/BIM-1053650
American Medical Association (AMA)
Lee, Bong Ju& Song, Ho Jun& Jeong, Jin. Structural and X-Ray Photoelectron Spectroscopy Study of Al-Doped Zinc-Oxide Thin Films. Advances in Materials Science and Engineering. 2015. Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1053650
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1053650