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Effect of Substrate Temperature on the Thermoelectric Properties of the Sb 2Te 3 Thin Films Deposition by Using Thermal Evaporation Method
Joint Authors
Lin, Jyun-Min
Chen, Ying-Chung
Chen, Wei
Yang, Cheng-Fu
Source
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-07-02
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
The antimony-telluride (Sb2Te3) thermoelectric thin films were prepared on SiO2/Si substrates by thermal evaporation method.
The substrate temperature that ranged from room temperature to 150°C was adopted to deposit the Sb2Te3 thin films.
The effects of substrate temperature on the microstructures and thermoelectric properties of the Sb2Te3 thin films were investigated.
The crystal structure and surface morphology of the Sb2Te3 thin films were characterized by X-ray diffraction analyses and field emission scanning electron microscope observation.
The RT-deposited Sb2Te3 thin films showed the amorphous phase.
Te and Sb2Te3 phases were coexisted in the Sb2Te3-based thin films as the substrate temperature was higher than room temperature.
The average grain sizes of the Sb2Te3-based thin films were 39 nm, 45 nm, 62 nm, 84 nm, and 108 nm, as the substrate temperatures were 50°C, 75°C, 100°C, 125°C, and 150°C, respectively.
The Seebeck coefficients, electrical conductivity, and power factor were measured at room temperature; we had found that they were critically dependent on the substrate temperature.
American Psychological Association (APA)
Lin, Jyun-Min& Chen, Ying-Chung& Yang, Cheng-Fu& Chen, Wei. 2015. Effect of Substrate Temperature on the Thermoelectric Properties of the Sb 2Te 3 Thin Films Deposition by Using Thermal Evaporation Method. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-6.
https://search.emarefa.net/detail/BIM-1068746
Modern Language Association (MLA)
Lin, Jyun-Min…[et al.]. Effect of Substrate Temperature on the Thermoelectric Properties of the Sb 2Te 3 Thin Films Deposition by Using Thermal Evaporation Method. Journal of Nanomaterials No. 2015 (2015), pp.1-6.
https://search.emarefa.net/detail/BIM-1068746
American Medical Association (AMA)
Lin, Jyun-Min& Chen, Ying-Chung& Yang, Cheng-Fu& Chen, Wei. Effect of Substrate Temperature on the Thermoelectric Properties of the Sb 2Te 3 Thin Films Deposition by Using Thermal Evaporation Method. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-6.
https://search.emarefa.net/detail/BIM-1068746
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1068746