Spectral Monitoring CHC2 Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu
Joint Authors
Wei, Hung-Sen
Liao, Shih-Fang
Chen, Hung-Pin
Lee, Cheng-Chung
Kuo, Chien-Cheng
Chen, Sheng-Hui
Chan, Shih-Hao
Source
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-07-01
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
Single-layer graphene was grown on copper at a low temperature of 600°C by plasma-assisted thermal chemical vapor deposition.
Its growth mechanism was discussed with reference to the emission spectra of the plasma.
The methane plasma produces the active species (Hx, CHx, and Cx) without the addition of flowing hydrogen, and the amounts of hydrogen-containing species can be controlled by varying the plasma power.
The effective distance was found between the plasma initial stage and the deposition stage for the single-layer graphene synthesis.
The results reveal that high-quality graphene can be synthesized using methane plasma at a suitable plasma power.
American Psychological Association (APA)
Chan, Shih-Hao& Liao, Shih-Fang& Chen, Hung-Pin& Wei, Hung-Sen& Chen, Sheng-Hui& Lee, Cheng-Chung…[et al.]. 2015. Spectral Monitoring CHC2 Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1069013
Modern Language Association (MLA)
Chan, Shih-Hao…[et al.]. Spectral Monitoring CHC2 Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu. Journal of Nanomaterials No. 2015 (2015), pp.1-5.
https://search.emarefa.net/detail/BIM-1069013
American Medical Association (AMA)
Chan, Shih-Hao& Liao, Shih-Fang& Chen, Hung-Pin& Wei, Hung-Sen& Chen, Sheng-Hui& Lee, Cheng-Chung…[et al.]. Spectral Monitoring CHC2 Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1069013
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1069013