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Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures
Joint Authors
Wang, Fang-Hsing
Liu, Han-Wen
Chao, Jen-Chi
Kang, Tsung-Kuei
Source
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-11, 11 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-01-13
Country of Publication
Egypt
No. of Pages
11
Main Subjects
Abstract EN
Transparent conducting titanium-doped zinc oxide (TZO) thin films were prepared on glass substrates by RF magnetron sputtering using 1.5 wt% TiO2-doped ZnO as the target.
Electrical, structural, and optical properties of films were investigated as a function of H2/(Ar + H2) flow ratios ( R H ) and substrate temperatures ( T S ).
The optimal R H value for achieving high conducting TZO:H thin film decreased from 10% to 1% when T S increased from RT to 300°C.
The lowest resistivity of 9.2 × 10 - 4 Ω-cm was obtained as T S = 100 °C and R H = 7.5 %.
X-ray diffraction patterns showed that all of TZO:H films had a hexagonal wurtzite structure with a preferred orientation in the (002) direction.
Atomic force microscopy analysis revealed that the film surface roughness increased with increasing R H .
The average visible transmittance decreased with increasing R H for the RT-deposited film, while it had not considerably changed with different R H for the 300°C-deposited films.
The optical bandgap increased as R H increased, which is consistent with the Burstein-Moss effect.
The figure of merits indicated that T S = 100 °C and R H = 7.5 % were optimal conditions for TZO thin films as transparent conducting electrode applications.
American Psychological Association (APA)
Wang, Fang-Hsing& Chao, Jen-Chi& Liu, Han-Wen& Kang, Tsung-Kuei. 2015. Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-11.
https://search.emarefa.net/detail/BIM-1069448
Modern Language Association (MLA)
Wang, Fang-Hsing…[et al.]. Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures. Journal of Nanomaterials No. 2015 (2015), pp.1-11.
https://search.emarefa.net/detail/BIM-1069448
American Medical Association (AMA)
Wang, Fang-Hsing& Chao, Jen-Chi& Liu, Han-Wen& Kang, Tsung-Kuei. Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-11.
https://search.emarefa.net/detail/BIM-1069448
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1069448