High-Speed Transmission and Mass Data Storage Solutions for Large-Area and Arbitrarily Structured Fabrication through Maskless Lithography

Abstract EN

This paper presents the implementation aspects and design of high-speed data transmission in laser direct-writing lithography.

With a single field programmable gate array (FPGA) chip, mass data storage management, transmission, and synchronization of each part in real-time were implemented.

To store a massive amount of data and transmit data with high bandwidth, a serial advanced technology attachment (SATA) intellectual property (IP) was developed on Xilinx Virtex-6 FPGA.

In addition, control of laser beam power, collection of status read back data of the lithography laser through an analog-to-digital converter, and synchronization of the positioning signal were implemented on the same FPGA.

A data structure for each unit with a unique exposure dose and other necessary information was established.

Results showed that the maximum read bandwidth (240 MB/s) and maximum write bandwidth (200 MB/s) of a single solid-state drive conform to the data transmission requirement.

The total amount of data meets the requirement of a large-area diffractive element approximately 102 cm2.

The throughput has been greatly improved at meters per second or square centimeter per second.

And test results showed that data transmission meets the requirement of the experiment.