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Two-Dimensional Electron Gas at SrTiO3-Based Oxide Heterostructures via Atomic Layer Deposition
Author
Source
Issue
Vol. 2016, Issue 2016 (31 Dec. 2016), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2016-08-08
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
Two-dimensional electron gas (2DEG) at an oxide interface has been attracting considerable attention for physics research and nanoelectronic applications.
Early studies reported the formation of 2DEG at semiconductor interfaces (e.g., AlGaAs/GaAs heterostructures) with interesting electrical properties such as high electron mobility.
Besides 2DEG formation at semiconductor junctions, 2DEG was realized at the interface of an oxide heterostructure such as the LaAlO3/SrTiO3 (LAO/STO) heterojunction.
The origin of 2DEG was attributed to the well-known “polar catastrophe” mechanism in oxide heterostructures, which consist of an epitaxial LAO layer on a single crystalline STO substrate among proposed mechanisms.
Recently, it was reported that the creation of 2DEG was achieved using the atomic layer deposition (ALD) technique, which opens new functionality of ALD in emerging nanoelectronics.
This review is focused on the origin of 2DEG at oxide heterostructures using the ALD process.
In particular, it addresses the origin of 2DEG at oxide interfaces based on an alternative mechanism (i.e., oxygen vacancies).
American Psychological Association (APA)
Lee, Sang Woon. 2016. Two-Dimensional Electron Gas at SrTiO3-Based Oxide Heterostructures via Atomic Layer Deposition. Journal of Nanomaterials،Vol. 2016, no. 2016, pp.1-9.
https://search.emarefa.net/detail/BIM-1109016
Modern Language Association (MLA)
Lee, Sang Woon. Two-Dimensional Electron Gas at SrTiO3-Based Oxide Heterostructures via Atomic Layer Deposition. Journal of Nanomaterials No. 2016 (2016), pp.1-9.
https://search.emarefa.net/detail/BIM-1109016
American Medical Association (AMA)
Lee, Sang Woon. Two-Dimensional Electron Gas at SrTiO3-Based Oxide Heterostructures via Atomic Layer Deposition. Journal of Nanomaterials. 2016. Vol. 2016, no. 2016, pp.1-9.
https://search.emarefa.net/detail/BIM-1109016
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1109016