Breath Figure-Assisted Fabrication of Nanostructured Coating on Silicon Surface and Evaluation of Its Antireflection Power

Abstract EN

We report our recent results on the fabrication of nanostructured polymer layers aimed at developing efficient antireflection coating on silicon.

The proposed manufacturing approach is based on self-assembly and relies on breath figure formation.

By simple and straightforward operations, we are able to produce different nanostructured coatings: densely packed nanodomes, randomly distributed nanopores, and multilayered close-packed nanopores.

By optical reflectivity measurements on coated silicon wafers, we show that the latter type of nanostructure is able to reduce the reflectivity of standard silicon surface (≈40% at 450 nm) to about 10%.