Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles
Joint Authors
Li, Jianjun
Zhang, Weiwei
Song, Yujun
Yin, Weiting
Zhang, Tao
Source
Issue
Vol. 2016, Issue 2016 (31 Dec. 2016), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2016-02-10
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
A new methodology is developed for the fabrication of nanostructures on substrate based on anodized Al2O3 (AAO) porous template transfer process.
It includes (1) forming amorphous alloy, negative UV-resist resin (i.e., SU-8), or PMMA (polymethylmethacrylate) plate nanorod arrays by hot-press molding amorphous alloy, negative UV-resist resin (i.e., SU-8), or PMMA plate into the anodized Al2O3 porous substrates; (2) removing AAO templates by chemical etching process after suitable posttreatment (annealing and/or irradiation) to improve the mechanical strength of the nanorod arrays; (3) reforming nanopore films by hot-embossing the nanorod arrays into a thin layer of polymer film on substrates (e.g., silica); (4) cleaning the bottom residues in pores of the films by oxygen plasmon.
The results indicate that the diameters of amorphous alloy (or negative UV-resist resin or PMMA) nanorod arrays can be ranged from 32 nm to 200 nm.
The diameters of the imprinted ILR-1050 photoresist nanopores are about 94.5 ± 12.2 nm and the diameters of the imprinted or SU-8 resin on glass slides nanopores are about 207 ± 26.4 nm, which inherit the diameters of AAO templates.
This methodology provides a general method to fabricate nanorods arrays and/or thin nanopore films by template transfer nanoimprint process.
American Psychological Association (APA)
Li, Jianjun& Zhang, Weiwei& Song, Yujun& Yin, Weiting& Zhang, Tao. 2016. Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles. Journal of Nanomaterials،Vol. 2016, no. 2016, pp.1-7.
https://search.emarefa.net/detail/BIM-1109501
Modern Language Association (MLA)
Li, Jianjun…[et al.]. Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles. Journal of Nanomaterials No. 2016 (2016), pp.1-7.
https://search.emarefa.net/detail/BIM-1109501
American Medical Association (AMA)
Li, Jianjun& Zhang, Weiwei& Song, Yujun& Yin, Weiting& Zhang, Tao. Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles. Journal of Nanomaterials. 2016. Vol. 2016, no. 2016, pp.1-7.
https://search.emarefa.net/detail/BIM-1109501
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1109501