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Spin Speed and Duration Dependence of TiO2 Thin Films pH Sensing Behavior
Joint Authors
Rusop, M.
Yusof, Khairul Aimi
Abdul Rahman, Rohanieza
Zulkefle, Muhammad AlHadi
Abdullah, Wan Fazlida Hanim
Herman, Sukreen Hana
Source
Issue
Vol. 2016, Issue 2016 (31 Dec. 2016), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2016-10-10
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
Titanium dioxide (TiO2) thin films were applied as the sensing membrane of an extended-gate field-effect transistor (EGFET) pH sensor.
TiO2 thin films were deposited by spin coating method and the influences of the spin speed and spin duration on the pH sensing behavior of TiO2 thin films were investigated.
The spin coated TiO2 thin films were connected to commercial metal-oxide-semiconductor field-effect transistor (MOSFET) to form the extended gates and the MOSFET was integrated in a readout interfacing circuit to complete the EGFET pH sensor system.
For the spin speed parameter investigation, the highest sensitivity was obtained for the sample spun at 3000 rpm at a fixed spinning time of 60 s, which was 60.3 mV/pH.
The sensitivity was further improved to achieve 68 mV/pH with good linearity of 0.9943 when the spin time was 75 s at the speed of 3000 rpm.
American Psychological Association (APA)
Zulkefle, Muhammad AlHadi& Abdul Rahman, Rohanieza& Yusof, Khairul Aimi& Abdullah, Wan Fazlida Hanim& Rusop, M.& Herman, Sukreen Hana. 2016. Spin Speed and Duration Dependence of TiO2 Thin Films pH Sensing Behavior. Journal of Sensors،Vol. 2016, no. 2016, pp.1-8.
https://search.emarefa.net/detail/BIM-1110721
Modern Language Association (MLA)
Zulkefle, Muhammad AlHadi…[et al.]. Spin Speed and Duration Dependence of TiO2 Thin Films pH Sensing Behavior. Journal of Sensors No. 2016 (2016), pp.1-8.
https://search.emarefa.net/detail/BIM-1110721
American Medical Association (AMA)
Zulkefle, Muhammad AlHadi& Abdul Rahman, Rohanieza& Yusof, Khairul Aimi& Abdullah, Wan Fazlida Hanim& Rusop, M.& Herman, Sukreen Hana. Spin Speed and Duration Dependence of TiO2 Thin Films pH Sensing Behavior. Journal of Sensors. 2016. Vol. 2016, no. 2016, pp.1-8.
https://search.emarefa.net/detail/BIM-1110721
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1110721