Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage
Joint Authors
Liu, Yang
Tan, Jiubin
Song, Fazhi
Cao, Jun
Li, Li
Source
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-11, 11 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-06-06
Country of Publication
Egypt
No. of Pages
11
Main Subjects
Abstract EN
Iterative learning control (ILC) is one of the most popular tracking control methods for systems that repeatedly execute the same task.
A system model is usually used in the analysis and design of ILC.
Model-based ILC results in general in fast convergence and good performance.
However, the model uncertainties and nonrepetitive disturbances hamper its practical applications.
One of the commonly used solutions is the introduction of a low-pass filter, namely, the Q-filter.
However, it is indicated in this paper that the existing Q-filter configurations compromise the servo performance, although improving the robustness.
Motivated by the combination of performance and robustness, a novel Q-filter configuration in ILC is presented in this paper.
Some practical considerations, such as the configuration of ILC in a feedback control system, the time delay compensation, and the learning coefficient, are provided in the implementation of the proposed ILC algorithm.
The effectiveness and superiority of the proposed ILC versus existing Q-filter ILC are demonstrated by both theoretical analysis and experimental verification on a wafer stage.
American Psychological Association (APA)
Song, Fazhi& Liu, Yang& Cao, Jun& Li, Li& Tan, Jiubin. 2018. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Complexity،Vol. 2018, no. 2018, pp.1-11.
https://search.emarefa.net/detail/BIM-1134656
Modern Language Association (MLA)
Song, Fazhi…[et al.]. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Complexity No. 2018 (2018), pp.1-11.
https://search.emarefa.net/detail/BIM-1134656
American Medical Association (AMA)
Song, Fazhi& Liu, Yang& Cao, Jun& Li, Li& Tan, Jiubin. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Complexity. 2018. Vol. 2018, no. 2018, pp.1-11.
https://search.emarefa.net/detail/BIM-1134656
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1134656