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H2OO2 Vapor Annealing Effect on Spin Coating Alumina Thin Films for Passivation of Silicon Solar Cells
Joint Authors
Uzum, Abdullah
Kanda, Hiroyuki
Noguchi, Takuma
Nakazawa, Yuya
Taniwaki, Shota
Hotta, Yasushi
Haruyama, Yuichi
Shibayama, Naoyuki
Ito, Seigo
Source
International Journal of Photoenergy
Issue
Vol. 2019, Issue 2019 (31 Dec. 2019), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2019-03-17
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
Aluminum acetylacetonate-based AlOx thin films were introduced as a low-cost, high-quality passivation layers for crystalline silicon solar cells.
Films were formed by a spin coating method on p-type silicon substrates at 450°C in ambient air, O2, or water vapor (H2O/O2) for 15 or 120 min.
XPS analysis confirms the AlOx formation and reveals a high intensity of interfacial SiOx at the AlOx/Si interface of processed wafers.
Ambient H2O/O2 was found to be more beneficial for the activation of introduced AlOx passivation films which offers high lifetime improvements with a low thermal budget.
Carrier lifetime measurements provides that symmetrically coated wafers reach 119.3 μs and 248.3 μs after annealing in ambient H2O/O2 for 15 min and 120 min, respectively.
American Psychological Association (APA)
Uzum, Abdullah& Kanda, Hiroyuki& Noguchi, Takuma& Nakazawa, Yuya& Taniwaki, Shota& Hotta, Yasushi…[et al.]. 2019. H2OO2 Vapor Annealing Effect on Spin Coating Alumina Thin Films for Passivation of Silicon Solar Cells. International Journal of Photoenergy،Vol. 2019, no. 2019, pp.1-7.
https://search.emarefa.net/detail/BIM-1167135
Modern Language Association (MLA)
Uzum, Abdullah…[et al.]. H2OO2 Vapor Annealing Effect on Spin Coating Alumina Thin Films for Passivation of Silicon Solar Cells. International Journal of Photoenergy No. 2019 (2019), pp.1-7.
https://search.emarefa.net/detail/BIM-1167135
American Medical Association (AMA)
Uzum, Abdullah& Kanda, Hiroyuki& Noguchi, Takuma& Nakazawa, Yuya& Taniwaki, Shota& Hotta, Yasushi…[et al.]. H2OO2 Vapor Annealing Effect on Spin Coating Alumina Thin Films for Passivation of Silicon Solar Cells. International Journal of Photoenergy. 2019. Vol. 2019, no. 2019, pp.1-7.
https://search.emarefa.net/detail/BIM-1167135
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1167135