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Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas
Joint Authors
Monne, Mahmuda Akter
Lan, Xing
Zhang, Chunbo
Chen, Maggie Yihong
Source
International Journal of Antennas and Propagation
Issue
Vol. 2018, Issue 2018 (31 Dec. 2018), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2018-03-28
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Abstract EN
This paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas.
The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines.
5-mil Kapton® polyimide film is used as a flexible substrate material.
Two different types of conductive ink PEDOT : PSS from Sigma Aldrich and silver nanoparticle ink from NovaCentrix are used for the fabrication of different printed layers.
Layer-by-layer fabrication process and material evaluation are illustrated.
Layer characterization is done with respect to critical thickness and resistance using 2D/3D material analysis.
Fujifilm Dimatix Material Printer (DMP-2800) is used for fabrication, and KLA-Tencor (P-7) profiler is used for 2D and 3D analysis of each layer.
The MEMS switch has a low actuation voltage of 1.2 V, current capacity of 0.2195 mA, a current on-off ratio of 2195 : 1, and an RF insertion loss of 5 dB up to 13.5 GHz.
Printed MEMS switch technology is a promising candidate for flexible and reconfigurable phased-array antennas and other radio frequency (RF) and microwave frequency applications.
American Psychological Association (APA)
Monne, Mahmuda Akter& Lan, Xing& Zhang, Chunbo& Chen, Maggie Yihong. 2018. Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas. International Journal of Antennas and Propagation،Vol. 2018, no. 2018, pp.1-10.
https://search.emarefa.net/detail/BIM-1168684
Modern Language Association (MLA)
Monne, Mahmuda Akter…[et al.]. Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas. International Journal of Antennas and Propagation No. 2018 (2018), pp.1-10.
https://search.emarefa.net/detail/BIM-1168684
American Medical Association (AMA)
Monne, Mahmuda Akter& Lan, Xing& Zhang, Chunbo& Chen, Maggie Yihong. Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas. International Journal of Antennas and Propagation. 2018. Vol. 2018, no. 2018, pp.1-10.
https://search.emarefa.net/detail/BIM-1168684
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1168684