Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst
Joint Authors
Yamamoto, Masashi
Nagaoka, Shiro
Umemoto, Hironobu
Ohdaira, Keisuke
Nishiyama, Takashi
Horibe, Hideo
Source
International Journal of Polymer Science
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-09-19
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
We examined an environmentally friendly photoresist removal method using H radicals produced by decomposing hydrogen on a hot iridium catalyst.
We examined the relationship between photoresist removal rate and its surface temperature using thin film interference and the removal properties using H radicals produced by the Ir catalyst.
Decomposition behavior at polymer surface by radicals may be analyzed in further detail from the aspect of kinetics.
Additionally, we investigated the oxygen addition effects on the removal rate.
The photoresist removal rate increased with the oxygen additive amount and then decreased more gradually than in the case of using W filament.
The increasing behavior was similar but there was a large difference between W and Ir catalyst in the decreasing behavior.
American Psychological Association (APA)
Yamamoto, Masashi& Nagaoka, Shiro& Umemoto, Hironobu& Ohdaira, Keisuke& Nishiyama, Takashi& Horibe, Hideo. 2017. Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst. International Journal of Polymer Science،Vol. 2017, no. 2017, pp.1-5.
https://search.emarefa.net/detail/BIM-1168901
Modern Language Association (MLA)
Yamamoto, Masashi…[et al.]. Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst. International Journal of Polymer Science No. 2017 (2017), pp.1-5.
https://search.emarefa.net/detail/BIM-1168901
American Medical Association (AMA)
Yamamoto, Masashi& Nagaoka, Shiro& Umemoto, Hironobu& Ohdaira, Keisuke& Nishiyama, Takashi& Horibe, Hideo. Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst. International Journal of Polymer Science. 2017. Vol. 2017, no. 2017, pp.1-5.
https://search.emarefa.net/detail/BIM-1168901
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1168901