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Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications
Author
Source
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-04-23
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
Bragg grating structure in a sol-gel silica waveguide is fabricated on the basis of nanoimprint lithography for biophotonic applications.
The process realizes nonstandardized lithography in sol-gel silica at a high resolution for a relatively large area in the range of several micrometers with a resolution in the order of several nanometers.
Here we demonstrate structures of 250 and 90 nm resolutions in a sol-gel silica optical waveguide for a large area that is not optimized to date.
Bragg grating of a 250 nm periodic structure is realized for a 1 mm long area.
American Psychological Association (APA)
Enami, Yasufumi. 2017. Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications. Journal of Sensors،Vol. 2017, no. 2017, pp.1-6.
https://search.emarefa.net/detail/BIM-1186981
Modern Language Association (MLA)
Enami, Yasufumi. Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications. Journal of Sensors No. 2017 (2017), pp.1-6.
https://search.emarefa.net/detail/BIM-1186981
American Medical Association (AMA)
Enami, Yasufumi. Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications. Journal of Sensors. 2017. Vol. 2017, no. 2017, pp.1-6.
https://search.emarefa.net/detail/BIM-1186981
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1186981