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Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films
Joint Authors
Hung, Hsien-Seng
Liu, Jeng-Cheng
Cheng, Yuang-Tung
Ho, Sheng-Yun
Chang, Shun-Hsyung
Source
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-05-14
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers.
The evaluated resonant frequency was calculated through finite-element analysis (FEA).
The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by using a pulsed sound technique with a sensitivity of −190 dB ± 2 dB for frequencies in the range 50–500 Hz.
These results indicate the high-performance miniaturized acoustic devices, which can impact a variety of technological applications.
American Psychological Association (APA)
Liu, Jeng-Cheng& Cheng, Yuang-Tung& Ho, Sheng-Yun& Hung, Hsien-Seng& Chang, Shun-Hsyung. 2017. Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films. Journal of Sensors،Vol. 2017, no. 2017, pp.1-7.
https://search.emarefa.net/detail/BIM-1187323
Modern Language Association (MLA)
Liu, Jeng-Cheng…[et al.]. Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films. Journal of Sensors No. 2017 (2017), pp.1-7.
https://search.emarefa.net/detail/BIM-1187323
American Medical Association (AMA)
Liu, Jeng-Cheng& Cheng, Yuang-Tung& Ho, Sheng-Yun& Hung, Hsien-Seng& Chang, Shun-Hsyung. Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films. Journal of Sensors. 2017. Vol. 2017, no. 2017, pp.1-7.
https://search.emarefa.net/detail/BIM-1187323
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1187323