Mechanical Characterization of PDMS Films for the Optimization of Polymer Based Flexible Capacitive Pressure Microsensors
Joint Authors
Dinh, T.-H.-N.
Martincic, E.
Dufour-Gergam, E.
Joubert, P.-Y.
Source
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-04-12
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensors dedicated to wearable applications.
The operating principle and the fabrication process of such microsensors are presented.
Then, the deformations under local pressure of PDMS thin films of thicknesses ranging from 100 μm to 10 mm are studied by means of numerical simulations in order to foresee the sensitivity of the considered microsensors.
The study points out that, for a given PDMS type, the sensor form ratio plays a major role in its sensitivity.
Indeed, for a given PDMS film, the expected capacitance change under a 10 N load applied on a 1.7 mm radius electrode varies from a few percent to almost 40% according to the initial PDMS film thickness.
These observations are validated by experimental characterizations carried out on PDMS film samples of various thicknesses (10 μm to 10 mm) and on actual microsensors.
Further computations enable generalized sensor design rules to be highlighted.
Considering practical limitations in the fabrication and in the implementation of the actual microsensors, design rules based on computed form ratio optimization lead to the elaboration of flexible pressure microsensors exhibiting a sensitivity which reaches up to 10%/N.
American Psychological Association (APA)
Dinh, T.-H.-N.& Martincic, E.& Dufour-Gergam, E.& Joubert, P.-Y.. 2017. Mechanical Characterization of PDMS Films for the Optimization of Polymer Based Flexible Capacitive Pressure Microsensors. Journal of Sensors،Vol. 2017, no. 2017, pp.1-9.
https://search.emarefa.net/detail/BIM-1187466
Modern Language Association (MLA)
Dinh, T.-H.-N.…[et al.]. Mechanical Characterization of PDMS Films for the Optimization of Polymer Based Flexible Capacitive Pressure Microsensors. Journal of Sensors No. 2017 (2017), pp.1-9.
https://search.emarefa.net/detail/BIM-1187466
American Medical Association (AMA)
Dinh, T.-H.-N.& Martincic, E.& Dufour-Gergam, E.& Joubert, P.-Y.. Mechanical Characterization of PDMS Films for the Optimization of Polymer Based Flexible Capacitive Pressure Microsensors. Journal of Sensors. 2017. Vol. 2017, no. 2017, pp.1-9.
https://search.emarefa.net/detail/BIM-1187466
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1187466