Dynamic Analysis of Multilayers Based MEMS Resonators
Joint Authors
Ouakad, Hassen M.
Alofi, Abdulrahman M.
Nayfeh, Ali H.
Source
Mathematical Problems in Engineering
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-14, 14 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-01-05
Country of Publication
Egypt
No. of Pages
14
Main Subjects
Abstract EN
The dynamic behavior of a microelectromechanical system (MEMS) parallel and electrically coupled double-layers (microbeams) based resonator is investigated.
Two numerical methods were used to solve the dynamical problem: the reduced-order modeling (ROM) and the perturbation method.
The ROM was derived using the so-called Galerkin expansion with considering the linear undamped mode shapes of straight beam as the basis functions.
The perturbation method was generated using the method of multiple scales by direct attack of the equations of motion.
Dynamic analyses, assuming the above two numerical methods were performed, and a comparison of the results showed good agreement.
Finally, a parametric study was performed using the perturbation on different parameters and the results revealed different interesting features, which hopefully can be useful for some MEMS based applications.
American Psychological Association (APA)
Ouakad, Hassen M.& Alofi, Abdulrahman M.& Nayfeh, Ali H.. 2017. Dynamic Analysis of Multilayers Based MEMS Resonators. Mathematical Problems in Engineering،Vol. 2017, no. 2017, pp.1-14.
https://search.emarefa.net/detail/BIM-1189448
Modern Language Association (MLA)
Ouakad, Hassen M.…[et al.]. Dynamic Analysis of Multilayers Based MEMS Resonators. Mathematical Problems in Engineering No. 2017 (2017), pp.1-14.
https://search.emarefa.net/detail/BIM-1189448
American Medical Association (AMA)
Ouakad, Hassen M.& Alofi, Abdulrahman M.& Nayfeh, Ali H.. Dynamic Analysis of Multilayers Based MEMS Resonators. Mathematical Problems in Engineering. 2017. Vol. 2017, no. 2017, pp.1-14.
https://search.emarefa.net/detail/BIM-1189448
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1189448