Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function
Joint Authors
Sun, Lining
Shi, Yunbo
Wang, Xin
Source
Issue
Vol. 2020, Issue 2020 (31 Dec. 2020), pp.1-16, 16 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2020-11-18
Country of Publication
Egypt
No. of Pages
16
Main Subjects
Abstract EN
This paper presents a multiparameter water quality sensor chip with temperature compensation.
The sensor chip was manufactured using microelectromechanical system (MEMS) technology.
The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors.
To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater.
The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with good linearity (R2=0.9998), the sensitivity of the temperature sensor was 0.949 Ω/°C, the sensitivity of the ammonia nitrogen sensor was 0.1139 mA/ppm, the sensitivity of the dissolved oxygen (DO) sensor was 2.22 μA/ppm, and the sensitivity of the temperature changes with respect to the heater power was 0.3126°C/mW.
Compared with a single water quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and had a good temperature compensation effect.
Moreover, the sensor chip was small in size, rugged, and highly accurate.
American Psychological Association (APA)
Wang, Xin& Sun, Lining& Shi, Yunbo. 2020. Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function. Journal of Sensors،Vol. 2020, no. 2020, pp.1-16.
https://search.emarefa.net/detail/BIM-1190707
Modern Language Association (MLA)
Wang, Xin…[et al.]. Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function. Journal of Sensors No. 2020 (2020), pp.1-16.
https://search.emarefa.net/detail/BIM-1190707
American Medical Association (AMA)
Wang, Xin& Sun, Lining& Shi, Yunbo. Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function. Journal of Sensors. 2020. Vol. 2020, no. 2020, pp.1-16.
https://search.emarefa.net/detail/BIM-1190707
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1190707