Resonance-Size Parameter Relationship and Dynamics of an AFM Subjected to Multimode Excitation and Based on the Modified Couple Stress Theory

Abstract EN

The mathematical model of AFM probe subjected to multimode excitation based on the modified couple stress theory is presented.

The semianalytical solution of the system is proposed.

The transient behavior and response spectrum of AFM probe subjected to multimode excitation are investigated.

It is very helpful to predict the nanotopography and surface properties based on the response of multimodes excitation.

The effects of the root excitation, size parameter, and interacting distance on the response spectrum and frequency shift are investigated.

The resonant frequency relation of the two systems with different size parameters is discovered and expressed in a formula.

The natural frequencies predicted via the formula and those determined by the semianalytical method are significantly consistent.