Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure
Joint Authors
Kowoll, Thomas
Müller, Erich
Fritsch-Decker, Susanne
Hettler, Simon
Störmer, Heike
Weiss, Carsten
Gerthsen, Dagmar
Source
Issue
Vol. 2017, Issue 2017 (31 Dec. 2017), pp.1-12, 12 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2017-04-06
Country of Publication
Egypt
No. of Pages
12
Main Subjects
Information Technology and Computer Science
Abstract EN
This study is concerned with backscattered electron scanning electron microscopy (BSE SEM) contrast of complex nanoscaled samples which consist of SiO2 nanoparticles (NPs) deposited on indium-tin-oxide covered bulk SiO2 and glassy carbon substrates.
BSE SEM contrast of NPs is studied as function of the primary electron energy and working distance.
Contrast inversions are observed which prevent intuitive interpretation of NP contrast in terms of material contrast.
Experimental data is quantitatively compared with Monte-Carlo- (MC-) simulations.
Quantitative agreement between experimental data and MC-simulations is obtained if the transmission characteristics of the annular semiconductor detector are taken into account.
MC-simulations facilitate the understanding of NP contrast inversions and are helpful to derive conditions for optimum material and topography contrast.
American Psychological Association (APA)
Kowoll, Thomas& Müller, Erich& Fritsch-Decker, Susanne& Hettler, Simon& Störmer, Heike& Weiss, Carsten…[et al.]. 2017. Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure. Scanning،Vol. 2017, no. 2017, pp.1-12.
https://search.emarefa.net/detail/BIM-1197902
Modern Language Association (MLA)
Kowoll, Thomas…[et al.]. Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure. Scanning No. 2017 (2017), pp.1-12.
https://search.emarefa.net/detail/BIM-1197902
American Medical Association (AMA)
Kowoll, Thomas& Müller, Erich& Fritsch-Decker, Susanne& Hettler, Simon& Störmer, Heike& Weiss, Carsten…[et al.]. Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure. Scanning. 2017. Vol. 2017, no. 2017, pp.1-12.
https://search.emarefa.net/detail/BIM-1197902
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1197902