Applying Fast Scanning Method Coupled with Digital Image Processing Technology as Standard Acquisition Mode for Scanning Electron Microscopy
Joint Authors
Oho, Eisaku
Suzuki, Kazuhiko
Yamazaki, Sadao
Source
Issue
Vol. 2020, Issue 2020 (31 Dec. 2020), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2020-03-31
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Information Technology and Computer Science
Abstract EN
This study proposes an efficient and fast method of scanning (e.g., television (TV) scan) coupled with digital image processing technology to replace the conventional slow-scan mode as a standard model of acquisition for general-purpose scanning electron microscopy (SEM).
SEM images obtained using the proposed method had the same quality in terms of sharpness and noise as slow-scan images, and it was able to suppress the adverse effects of charging in a full-vacuum condition, which is a challenging problem in this area.
Two problems needed to be solved in designing the proposed method.
One was suitable compensation in image quality using the inverse filter based on characteristics of the frequency of a TV-scan image, and the other to devise an accurate technique of image integration (noise suppression), the position alignment of which is robust against noise.
This involved using the image montage technique and estimating the number of images needed for the integration.
The final result of our TV-scan mode was compared with the slow-scan image as well as the conventional TV-scan image.
American Psychological Association (APA)
Oho, Eisaku& Suzuki, Kazuhiko& Yamazaki, Sadao. 2020. Applying Fast Scanning Method Coupled with Digital Image Processing Technology as Standard Acquisition Mode for Scanning Electron Microscopy. Scanning،Vol. 2020, no. 2020, pp.1-9.
https://search.emarefa.net/detail/BIM-1207432
Modern Language Association (MLA)
Oho, Eisaku…[et al.]. Applying Fast Scanning Method Coupled with Digital Image Processing Technology as Standard Acquisition Mode for Scanning Electron Microscopy. Scanning No. 2020 (2020), pp.1-9.
https://search.emarefa.net/detail/BIM-1207432
American Medical Association (AMA)
Oho, Eisaku& Suzuki, Kazuhiko& Yamazaki, Sadao. Applying Fast Scanning Method Coupled with Digital Image Processing Technology as Standard Acquisition Mode for Scanning Electron Microscopy. Scanning. 2020. Vol. 2020, no. 2020, pp.1-9.
https://search.emarefa.net/detail/BIM-1207432
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1207432