Fast Specimen Boundary Tracking and Local Imaging with Scanning Probe Microscopy

Abstract EN

An efficient and adaptive boundary tracking method is developed to confine area of interest for high-efficiency local scanning.

By using a boundary point determination criterion, the scanning tip is steered with a sinusoidal waveform while estimating azimuth angle and radius ratio of each boundary point to accurately track the boundary of targets.

A local scan region and path are subsequently planned based on the prior knowledge of boundary tracking to reduce the scan time.

Boundary tracking and local scanning methods have great potential not only for fast dimension measurement but also for sample surface topography and physical characterization, with only scanning region of interest.

The performance of the proposed methods was verified by using the alternate current mode scanning ion-conductance microscopy, tapping, and PeakForce modulation atomic force microscopy.

Experimental results of single/multitarget boundary tracking and local scanning of target structures with complex boundaries demonstrate the flexibility and validity of the proposed method.