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Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope
Joint Authors
Feng, Jingjing
Zhang, Qichang
Hao, Shuying
Zhu, Yulun
Song, Yuhao
Zhang, Kunpeng
Source
Issue
Vol. 2020, Issue 2020 (31 Dec. 2020), pp.1-15, 15 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2020-10-27
Country of Publication
Egypt
No. of Pages
15
Main Subjects
Abstract EN
The electrostatic force nonlinearity caused by fringe effects of the microscale comb will affect the dynamic performance of the micromechanical vibrating gyroscopes (MVGs).
In order to reveal the influence mechanism, a class of four-degree-of-freedom (4-DOF) electrostatically driven MVG is considered.
The influence of DC bias voltage and comb spacing on the nonlinearity of electrostatic force and the dynamic response of the MVG by using multiple time scales method and numerical simulation are discussed.
The results indicate that the electrostatic force nonlinearity causes the system to show stiffness softening.
The softening characteristics of the electrostatic force cause the offset of the resonance frequency and a decrease in sensitivity.
Although the electrostatic nonlinearity has a great influence on the dynamic behaviour, its influence can be avoided by the reasonable design of the comb spacing and DC bias voltage.
There exists a critical value for comb spacing and DC bias voltage.
In this paper, determining the critical values is demonstrated by nonlinear dynamics analysis.
The results can be supported by the finite element analysis and numerical simulation.
American Psychological Association (APA)
Hao, Shuying& Zhu, Yulun& Song, Yuhao& Zhang, Qichang& Feng, Jingjing& Zhang, Kunpeng. 2020. Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope. Shock and Vibration،Vol. 2020, no. 2020, pp.1-15.
https://search.emarefa.net/detail/BIM-1213132
Modern Language Association (MLA)
Hao, Shuying…[et al.]. Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope. Shock and Vibration No. 2020 (2020), pp.1-15.
https://search.emarefa.net/detail/BIM-1213132
American Medical Association (AMA)
Hao, Shuying& Zhu, Yulun& Song, Yuhao& Zhang, Qichang& Feng, Jingjing& Zhang, Kunpeng. Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope. Shock and Vibration. 2020. Vol. 2020, no. 2020, pp.1-15.
https://search.emarefa.net/detail/BIM-1213132
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1213132