Deposition of CeO2 TCP thin film on stainless steel 316 L by RF sputtering

Abstract EN

RF sputtering method was used for deposition 70wt% CeO2/TCP thin film on stainless steel 316L surface.

The selection of ceria and tricalcium phosphate is according to the fact the importance of these materials in biomedical media.

The produced coating was characterized by XRD, FESEM/EDS and AFM analysis, the result revealed that the obtained peaks from XRD refer to the deposited materials.

When substitution of Ce was done, distorting of the lattice structure can occur suggesting certain incorporation of the cerium oxide within TCP lattice.

Also, from SEM investigation uniformly homogeneous surface as a layer of (CeO2 + CaO) and TCP as sharp plate-like crystals.

EDS analysis of coating confirms the presence of Ce, Ca, O and P elements, thickness was determined at 130.7 nm.

The soaking in Simulation body fluid indicated the formation of layers like hydroxyapatite, which investigated by XRD and FESEM/EDS methods.