A theoretical study of the possibility of obtaining the radioisotope 13n for medical applications using dense plasma focus device
Joint Authors
Knapek, A.
Drozd, M.
Matejka, M.
Chlumska, J.
Kral, S.
Kolarik, V.
Source
Issue
Vol. 13, Issue 2 (31 Aug. 2020), pp.93-100, 8 p.
Publisher
Yarmouk University Deanship of Research and Graduate Studies
Publication Date
2020-08-31
Country of Publication
Jordan
No. of Pages
8
Main Subjects
Abstract EN
Quality control of the resist coating on a silicon wafer is one of the major tasks prior to the exposition of patterns into the resist layer.
thus, the ability to inspect and identify the physical defect in the resist layer plays an important role.
the absence of any unwanted defect in resist is an ultimate requirement for preparation of precise and functional micro- or nano-patterned surfaces.
currently used wafer inspection systems are mostly utilized in semiconductor or microelectronic industry to inspect non-patterned or patterned wafers (integrated circuits, photomasks, … etc.) in order to achieve high yield production.
typically, they are based on acoustic micro-imaging, optical imaging or electron microscopy.
this paper presents the design of a custom optical-based inspection device for small batch lithography production that allows scanning a wafer surface with an optical camera and by analyzing the captured images to determine the coordinates (x, y), the size and the type of the defects in the resist layer.
in addition, software responsible for driving the scanning device and for advanced image processing is presented.
American Psychological Association (APA)
Knapek, A.& Drozd, M.& Matejka, M.& Chlumska, J.& Kral, S.& Kolarik, V.. 2020. A theoretical study of the possibility of obtaining the radioisotope 13n for medical applications using dense plasma focus device. Jordan Journal of Physics،Vol. 13, no. 2, pp.93-100.
https://search.emarefa.net/detail/BIM-1282936
Modern Language Association (MLA)
Knapek, A.…[et al.]. A theoretical study of the possibility of obtaining the radioisotope 13n for medical applications using dense plasma focus device. Jordan Journal of Physics Vol. 13, no. 2 (Aug. 2020), pp.93-100.
https://search.emarefa.net/detail/BIM-1282936
American Medical Association (AMA)
Knapek, A.& Drozd, M.& Matejka, M.& Chlumska, J.& Kral, S.& Kolarik, V.. A theoretical study of the possibility of obtaining the radioisotope 13n for medical applications using dense plasma focus device. Jordan Journal of Physics. 2020. Vol. 13, no. 2, pp.93-100.
https://search.emarefa.net/detail/BIM-1282936
Data Type
Journal Articles
Language
English
Record ID
BIM-1282936