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Evaluation for diaphragm's deflecton for touch mode mems pressure sensors
Joint Authors
Hezarjaribi, Yadollah
Hamdun, Mohd
Sidek, Roslina
Hossein, Keshmiri
Abd Allah, Raja
Bahadorimehr, Alireza
Source
The International Arab Journal of Information Technology
Issue
Vol. 8, Issue 2 (30 Apr. 2011), pp.141-146, 6 p.
Publisher
Publication Date
2011-04-30
Country of Publication
Jordan
No. of Pages
6
Main Subjects
Information Technology and Computer Science
Abstract EN
In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed.
The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using finite elements analysis for a circular diaphragm deflection before and after touch point.
By looking at MEMS devices, when the diaphragm starts touching the fixed electrode by applying loads, it will have a major effect on the overall performance of the device.
Therefore, one should consider the effect of touch mode in the system to achieve good linearity, large operating pressure range and large overload protection at output.
As of so far the effect of touch mode has not been evaluated efficiently in the literatures.
The proposed touch mode MEMS capacitive pressure sensor demonstrated diaphragm with radius of 180 µm, the gap depth of 0.5µ m and the sensor exhibit a linear response with pressure from 0.05 MPA to 2 MPA.
American Psychological Association (APA)
Hezarjaribi, Yadollah& Hamdun, Mohd& Sidek, Roslina& Hossein, Keshmiri& Abd Allah, Raja& Bahadorimehr, Alireza. 2011. Evaluation for diaphragm's deflecton for touch mode mems pressure sensors. The International Arab Journal of Information Technology،Vol. 8, no. 2, pp.141-146.
https://search.emarefa.net/detail/BIM-249330
Modern Language Association (MLA)
Hezarjaribi, Yadollah…[et al.]. Evaluation for diaphragm's deflecton for touch mode mems pressure sensors. The International Arab Journal of Information Technology Vol. 8, no. 2 (Apr. 2011), pp.141-146.
https://search.emarefa.net/detail/BIM-249330
American Medical Association (AMA)
Hezarjaribi, Yadollah& Hamdun, Mohd& Sidek, Roslina& Hossein, Keshmiri& Abd Allah, Raja& Bahadorimehr, Alireza. Evaluation for diaphragm's deflecton for touch mode mems pressure sensors. The International Arab Journal of Information Technology. 2011. Vol. 8, no. 2, pp.141-146.
https://search.emarefa.net/detail/BIM-249330
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 145
Record ID
BIM-249330