Expert system design of beam spot size measurements in FIB system

Abstract EN

This is a design of an expert system in the focused ion beam optical system by using fuzzy logic technique to build an intelligent agent.

Present software has been designed as an interpretation expert system, written in Visual C# for optimizing the calculation of three electrostatic lenses column.

By using such rule based engine, the axial potential distributions for electrostatic fields undergo the constraints have been used to find spot size focusing for ions in the image plane which have values are very useful for getting and designing FIB model, over ranges of ion beam angles (5, 10, 30, 50, 75 and 100) mrad.