Characteristics study of SN plasma produced by laser

Dissertant

Ali, Khawlah Abd al-Kazim

University

University of Technology

Faculty

-

Department

Applied Sciences Department

University Country

Iraq

Degree

Master

Degree Date

2009

English Abstract

We have studied Sn plasma which is produced by different laser wavelengths mid different pulse durations.

Laser produced Sn plasma is currently considered as a candidate for an ETJV radiation source.

Studied Sinan efficient targeted produce 13.5 nm EUV radiations, has major applications such as lithography application.

As well as laser produce Sn plasma is considered as a tasting media at 11.9 nm, as it is relatively produced high gain.

The research consists of three topics: First, the electron temperature and density were estimated from the analysis of spectral data.

The electron temperature measurements have been performed: by line ratio method using different wavelength transition of many Sn spectra, while the electron density measurements were made using the Stark broadening method using singly ionized Sn lines for the wavelength 645A nm.

We found that the FWHM of Stark broadening of Sn plasma that produced by Easer was much larger than that produced by a discharge.

The spatial distributions were measured for the most important parameters of the pajamas, electron temperature (Tc) and density (NU) at various locations in the plasma.

The spatial variation of density showed inverse proportionality with the distance.

Second, we have studied the refractive index for Sn plasma, using a formula which shows the effect of the bound electrons on the refractive index using mterferometry experiments.

We calculated the refractive index as a function of many parameters.

The refractive index is increased with the increasing of plasma temperature and with the increasing of "the ionization state.

Final, we studied the conversion efficiency for Sn plasma using two theories.

A.

study the conversion efficiency through the delay time and indicate the dty-dependerat behavior.

The maximum CE is equal 3-4.

Achi-cvedi when plasma thickness-, plasma expansion distance during laser heating, and absorption length are all the same, B.

In this theory of the conversion inky of the 13.5 nm that produced from Sn plasma is indicated that the legends on the plasma hydrodyriamic- The maximum CE was equal to 7, vied at the maximum plasma temperature (60 eV) and maximum action states of (l 3).

Main Subjects

Physics

Topics

• Spectrometers
• Optics
• Light
• Analytical chemistry
• Absorption spectra

• APA
• MLA
• AMA

Language

English

Data Type

Arab Theses

Record ID

BIM-305047