Double probe for measuring the plasma parameters

Abstract EN

In this work the diode planer magnetron sputtering device was designed and fabricated.

This device consists of two aluminum discs (8cm) diameter and (5mm) thick.

The distance between the two electrodes is 2cm, 3cm, 4cm and 5cm.

Design and construction a double probe of tungsten wire with (0.1mm) diameter and (1.2mm) length has been done to investigate electron temperature, electron and ion density under different distances between cathode and anode.

The probes were situated in the center of plasma between anode and cathode.

The results of this work show that, when the distance between cathode and anode increased, the electron temperature decreased.

Also, the electron density increases with the increasing of the distance between the two electrodes.

The behavior of ion density is similar to that of electrons but the value is higher.