Investigation of the electron energy distribution function in capacitively coupled (13.56 MHz) radio frequency discharge in dry air
Other Title(s)
دراسة دالة التوزيع الطاقي للالكترونات في التفريغ الراديوي السعوي 13.56 MHz في الهواء الجاف
Joint Authors
al-Rawachi, Haytham A.
al-Suwar, Hibah T.
Source
Issue
Vol. 24, Issue 6 (31 Dec. 2013), pp.82-95, 14 p.
Publisher
University of Mosul College of Science
Publication Date
2013-12-31
Country of Publication
Iraq
No. of Pages
14
Main Subjects
Abstract AR
في هذه الدراسة تم قياس دالة التوزيع الطاقي للإلكترونات في التفريغ الراديوي السعوي للهواء الجاف في ثلاث مناطق مختلفة على طول أنبوبة التفريغ.
لقد لوحظ أن دالة فيرمي هي السائدة في المناطق الثلاثة و أن قيمتها تتناسب طرديا مع القدرة المسلطة و عكسيا مع الضغط الداخلي أن القيمة العليا لهذه الدالة تكون بالقرب من القطب الموجب و تنخفض باتجاه القطب السالب.
Abstract EN
In this study, the electron energy distribution function in capacitively coupled radio frequency dry air discharge in three different regions along discharge tube was measured.
It was observed that all regions do have Fermi electron energy distribution function which increases in magnitude with increasing the applied power, and decreasing with increasing the internal pressure.
This function magnitude reaches its highest value near the powered electrode, while it decreases towards the earthed one.
American Psychological Association (APA)
al-Rawachi, Haytham A.& al-Suwar, Hibah T.. 2013. Investigation of the electron energy distribution function in capacitively coupled (13.56 MHz) radio frequency discharge in dry air. Rafidain Journal of Science،Vol. 24, no. 6, pp.82-95.
https://search.emarefa.net/detail/BIM-345380
Modern Language Association (MLA)
al-Rawachi, Haytham A.& al-Suwar, Hibah T.. Investigation of the electron energy distribution function in capacitively coupled (13.56 MHz) radio frequency discharge in dry air. Rafidain Journal of Science Vol. 24, no. 6 (2013), pp.82-95.
https://search.emarefa.net/detail/BIM-345380
American Medical Association (AMA)
al-Rawachi, Haytham A.& al-Suwar, Hibah T.. Investigation of the electron energy distribution function in capacitively coupled (13.56 MHz) radio frequency discharge in dry air. Rafidain Journal of Science. 2013. Vol. 24, no. 6, pp.82-95.
https://search.emarefa.net/detail/BIM-345380
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 94-95
Record ID
BIM-345380