Co-axial geometry : a new concept in excimer laser design

Abstract EN

A new design of a rare gas halide excimer laser is described.

Co-axial high voltage geometry is employed, which permits the gas containment vessel to be constructed primarily from metal and ceramic materials, with the elimination of organic plastics.

This design results in greater simplicity, improved reliability, longer gas lifetimes and lower operating costs.

The background to this concept is discussed, and the development of a commercial excimer laser based on this design is described.