Fabrication and characterization of ZnO gas sensor

Abstract EN

In this paper thin films of zinc oxide ZnO was prepared by spray pyrolyess method with thickness were about (0.1 ± 0.05 μm) on n-type silicon substrates at different deposition temperature (300, 400, 500) C°, from zinc chloride at concentrations (0.05, 0.1) M as a sensor for pollutant gases like CO2, NO2, and H2S related with oil manufacture.

The crystallinity and morphology of the films were characterized by XRD, and optical microscopy was done on prepared films, addition to sensitivity to polluting gases previously mentioned at different test temperature (10-50) C°.

Result shows that the crystallization increased by increasing deposition temperature (substrate temperature), and the sensitivity increased by rising both of the gas concentration or temperature.