Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films
Joint Authors
Yamamoto, Naoki
Yamamoto, Tetsuya
Makino, Hisao
Source
Advances in Materials Science and Engineering
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-07-25
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
A new technique for measuring Young's modulus of an ultra-thin film, with a thickness in the range of about 10 nm, was developed by combining an optical lever technique for measuring the residual stress and X-ray diffraction for measuring the strain in the film.
The new technique was applied to analyze the mechanical properties of Ga-doped ZnO (GZO) films, that have become the focus of significant attention as a substitute material for indium-tin-oxide transparent electrodes.
Young's modulus of the as-deposited GZO films decreased with thickness; the values for 30 nm and 500 nm thick films were 205 GPa and 117 GPa, respectively.
The coefficient of linear thermal expansion of the GZO films was measured using the new technique in combination with in-situ residual stress measurement during heat-cycle testing.
GZO films with 30–100 nm thickness had a coefficient of linear thermal expansion in the range of 4.3 × 10−6 – 5.6 × 10−6 °C−1.
American Psychological Association (APA)
Yamamoto, Naoki& Makino, Hisao& Yamamoto, Tetsuya. 2011. Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films. Advances in Materials Science and Engineering،Vol. 2011, no. 2011, pp.1-10.
https://search.emarefa.net/detail/BIM-448543
Modern Language Association (MLA)
Yamamoto, Naoki…[et al.]. Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films. Advances in Materials Science and Engineering No. 2011 (2011), pp.1-10.
https://search.emarefa.net/detail/BIM-448543
American Medical Association (AMA)
Yamamoto, Naoki& Makino, Hisao& Yamamoto, Tetsuya. Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films. Advances in Materials Science and Engineering. 2011. Vol. 2011, no. 2011, pp.1-10.
https://search.emarefa.net/detail/BIM-448543
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-448543