Effect of ArCH4 Mixture Ratio on Properties of AgC : H Nanocomposite Prepared by DC Sputtering
Joint Authors
Mohsen Soltani, E.
Ghorannevis, Z.
Shirazi, M.
Source
Advances in Materials Science and Engineering
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-09-11
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
Ag/C:H films were deposited by DC sputtering method on Si substrates with different Ar/CH4 gas mixture ratios.
Effect of Ar/CH4 gas mixture ratios was investigated on optical and structural properties of Ag/C:H films by FTIR spectroscopy analysis, X-Ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM), respectively.
In order to evaluate the effect of gas flow ratio on the optical and structural properties of Ag/C:H films, Ar/CH4 gas ratio was changed by keeping the Ar flow rate constant while varying the CH4 gas flow rate (2, 5, and 10 SCCM).
From FTIR analysis it was observed that increase in the Ar/CH4 gas ratio results in decreasing the sputtered Ag nanoparticles and increasing of C–H bonds.
Also from XRD pattern it was found that intensity of Ag crystalline plane and average grain size decrease by adding CH4 to working gas admixture.
From SEM and AFM micrographs, size of the grains also became smaller on the surface of the films, which will lead to decreasing the roughness of the deposited thin films.
American Psychological Association (APA)
Mohsen Soltani, E.& Ghorannevis, Z.& Shirazi, M.. 2013. Effect of ArCH4 Mixture Ratio on Properties of AgC : H Nanocomposite Prepared by DC Sputtering. Advances in Materials Science and Engineering،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-449101
Modern Language Association (MLA)
Mohsen Soltani, E.…[et al.]. Effect of ArCH4 Mixture Ratio on Properties of AgC : H Nanocomposite Prepared by DC Sputtering. Advances in Materials Science and Engineering No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-449101
American Medical Association (AMA)
Mohsen Soltani, E.& Ghorannevis, Z.& Shirazi, M.. Effect of ArCH4 Mixture Ratio on Properties of AgC : H Nanocomposite Prepared by DC Sputtering. Advances in Materials Science and Engineering. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-449101
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-449101