High-Resolution Magnetic Force Microscopy Using Carbon Nanotube Probes Fabricated Directly by Microwave Plasma-Enhanced Chemical Vapor Deposition

Abstract EN

Carbon nanotubes (CNTs) have been successfully grown on the tip apex of an atomic force microscopy (AFM) cantilever by microwave plasma-enhanced chemical vapor deposition (MPECVD).

Both scanning electron microscopy (SEM) and transmission electron microscopy (TEM) observations reveal that the diameter of the CNTs is ∼30 nm and the magnetic particles with diameter of ∼20 nm, which was used as catalyst for the CNT growth, exist on the top.

This CNT probe has been applied to magnetic force microscopy (MFM) on the ultrahigh-density magnetic recording media with 1200 kilo flux change per inch (kfci).