A 3 DOF Model for an Electromagnetic Air Mount
Joint Authors
Kim, HyungTae
Han, HyunHee
Baek, JaeHo
Kim, CheolHo
Lee, KangWon
Kang, SungBok
Source
Advances in Acoustics and Vibration
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-01-18
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
A 4×4 matrix model with three degrees of freedom is proposed as a means for controlling microvibrations and applied to an electromagnetic isolator.
The model was derived from an assumption based on small- and low-frequency vibrations.
The coordinates of the 3 DOF was composed of the 4 variables, representing a vertical position, pitch, roll, and a proof term.
The coordinates were calculated from the 4 position sensors in the isolator and formulated into a 4×4 matrix, which possesses inversive full rank.
The electro-magnetic isolator was built for a simulated machine in semiconductor manufacturing and consisted of a heavy surface plate, sensors, amps, a controller, and air springs with electromagnets.
The electromagnets are installed in a pneumatic chamber of the individual air spring.
The performance of the 3 DOF model was experimented and compared with that of a 1 DOF model in an impact test.
The settling time in the result was reduced to 25%.
American Psychological Association (APA)
Kim, HyungTae& Kim, CheolHo& Kang, SungBok& Lee, KangWon& Baek, JaeHo& Han, HyunHee. 2012. A 3 DOF Model for an Electromagnetic Air Mount. Advances in Acoustics and Vibration،Vol. 2012, no. 2012, pp.1-6.
https://search.emarefa.net/detail/BIM-455495
Modern Language Association (MLA)
Kim, HyungTae…[et al.]. A 3 DOF Model for an Electromagnetic Air Mount. Advances in Acoustics and Vibration No. 2012 (2012), pp.1-6.
https://search.emarefa.net/detail/BIM-455495
American Medical Association (AMA)
Kim, HyungTae& Kim, CheolHo& Kang, SungBok& Lee, KangWon& Baek, JaeHo& Han, HyunHee. A 3 DOF Model for an Electromagnetic Air Mount. Advances in Acoustics and Vibration. 2012. Vol. 2012, no. 2012, pp.1-6.
https://search.emarefa.net/detail/BIM-455495
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-455495