Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering
Joint Authors
Zhang, Jingquan
Feng, Lianghuan
Wu, Lili
Zhao, Yu
Jiang, Hongchao
Li, Wei
Leng, Dan
Source
International Journal of Photoenergy
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-07-25
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
Tin oxide SnO2 films were prepared by RF magnetron sputtering.
The effects of oxygen partial pressure percentage on the SnO2 property have been investigated to obtain relatively high-resistivity SnO2 films which could be used as buffer layers to optimize the performance of CdTe/CdS solar cells.
The oxygen partial pressure percentage varied in the range of 1%~10%.
The results show that the introduction of oxygen would suppress the deposition and growth of SnO2 films.
Electrical measurement suggests that the film resistivity decreases with the increase of oxygen pressure.
The SnO2 films with resistivity of 232 Ω cm were obtained in pure Ar atmosphere.
All SnO2 films fabricated with different oxygen partial pressure percentage have almost the same optical band gap.
American Psychological Association (APA)
Leng, Dan& Wu, Lili& Jiang, Hongchao& Zhao, Yu& Zhang, Jingquan& Li, Wei…[et al.]. 2012. Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering. International Journal of Photoenergy،Vol. 2012, no. 2012, pp.1-6.
https://search.emarefa.net/detail/BIM-456111
Modern Language Association (MLA)
Leng, Dan…[et al.]. Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering. International Journal of Photoenergy No. 2012 (2012), pp.1-6.
https://search.emarefa.net/detail/BIM-456111
American Medical Association (AMA)
Leng, Dan& Wu, Lili& Jiang, Hongchao& Zhao, Yu& Zhang, Jingquan& Li, Wei…[et al.]. Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering. International Journal of Photoenergy. 2012. Vol. 2012, no. 2012, pp.1-6.
https://search.emarefa.net/detail/BIM-456111
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-456111