Cantilever Beam Metal-Contact MEMS Switch
Joint Authors
Aburwein, Abdulmagid A.
Emhemmed, Adel Saad
Source
Conference Papers in Engineering
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-4, 4 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-05-23
Country of Publication
Egypt
No. of Pages
4
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem.
Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.
American Psychological Association (APA)
Emhemmed, Adel Saad& Aburwein, Abdulmagid A.. 2013. Cantilever Beam Metal-Contact MEMS Switch. Conference Papers in Engineering،Vol. 2013, no. 2013, pp.1-4.
https://search.emarefa.net/detail/BIM-458756
Modern Language Association (MLA)
Emhemmed, Adel Saad& Aburwein, Abdulmagid A.. Cantilever Beam Metal-Contact MEMS Switch. Conference Papers in Engineering No. 2013 (2013), pp.1-4.
https://search.emarefa.net/detail/BIM-458756
American Medical Association (AMA)
Emhemmed, Adel Saad& Aburwein, Abdulmagid A.. Cantilever Beam Metal-Contact MEMS Switch. Conference Papers in Engineering. 2013. Vol. 2013, no. 2013, pp.1-4.
https://search.emarefa.net/detail/BIM-458756
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-458756
