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Hydrogen Charging Effects in PdTiTiO2Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods
Joint Authors
Zakrzewska, K.
Schmitt, C.
Brudnik, A.
Marszałek, M.
Becker, H.-W.
Flege, S.
Balogh, Adam Georg
Kim-Ngan, Nhu-T. H.
Drogowska, K.
Tarnawski, Z.
Rogalla, D.
Source
Advances in Materials Science and Engineering
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-10-23
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
Titanium and titanium dioxide thin films were deposited onto Si(111) substrates by magnetron sputtering from a metallic Ti target in a reactive Ar+O2 atmosphere, the composition of which was controlled by precision gas controllers.
For some samples, 1/3 of the surface was covered with palladium using molecular beam epitaxy.
Chemical composition, density, and layer thickness of the layers were determined by Auger electron spectroscopy (AES) and Rutherford backscattering spectrometry (RBS).
The surface morphology was studied using high-resolution scanning electron microscopy (HRSEM).
After deposition, smooth, homogenous sample surfaces were observed.
Hydrogen charging for 5 hours under pressure of 1 bar and at temperature of 300°C results in granulation of the surface.
Hydrogen depth profile was determined using secondary ion mass spectrometry (SIMS) and nuclear Reaction Analysis (N-15 method), using a 15N beam at and above the resonance energy of 6.417 MeV.
NRA measurements proved a higher hydrogen concentration in samples with partially covered top layers, than in samples without palladium.
The highest value of H concentration after charging was about 50% (in the palladium-covered part) and about 40% in titanium that was not covered by Pd.
These values are in good agreement with the results of SIMS measurements.
American Psychological Association (APA)
Drogowska, K.& Flege, S.& Schmitt, C.& Rogalla, D.& Becker, H.-W.& Kim-Ngan, Nhu-T. H.…[et al.]. 2011. Hydrogen Charging Effects in PdTiTiO2Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods. Advances in Materials Science and Engineering،Vol. 2012, no. 2012, pp.1-8.
https://search.emarefa.net/detail/BIM-459046
Modern Language Association (MLA)
Drogowska, K.…[et al.]. Hydrogen Charging Effects in PdTiTiO2Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods. Advances in Materials Science and Engineering No. 2012 (2012), pp.1-8.
https://search.emarefa.net/detail/BIM-459046
American Medical Association (AMA)
Drogowska, K.& Flege, S.& Schmitt, C.& Rogalla, D.& Becker, H.-W.& Kim-Ngan, Nhu-T. H.…[et al.]. Hydrogen Charging Effects in PdTiTiO2Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods. Advances in Materials Science and Engineering. 2011. Vol. 2012, no. 2012, pp.1-8.
https://search.emarefa.net/detail/BIM-459046
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-459046