Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Abstract EN

Secondary electron energy and angle dependent differential cross sections for the production of cations SiHn+ (n=0–3), H2+ and H+ resulting from dissociative ionization of SiH4by electron collision have been evaluated at fixed incident electron energies of 100 and 200 eV.

The semiempirical formulation of Jain and Khare which requires the oscillator strength data as a major input has been employed.

In the absence of experimental data for differential cross sections, the corresponding derived integral partial and total ionization cross sections in the energy range varying from ionization threshold to 1000 eV revealed a satisfactory agreement with the available experimental and theoretical data.

We have also evaluated the ionization rate coefficients on the basis of calculated partial ionization cross sections and Maxwell-Boltzmann energy distributions.