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Vertical MEMS Resonators for Real-Time Clock Applications
Joint Authors
Flora, P.
Morea, A.
Pomarico, A.
Roselli, G.
Lasalandra, E.
Source
Issue
Vol. 2010, Issue 2010 (31 Dec. 2010), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2010-12-01
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
MEMS resonators are today widely investigated as a desirable alternative to quartz resonators in real-time clock applications, because of their low-cost, integration capability properties.
Nevertheless, MEMS resonators performances are still not competitive, especially in terms of frequency stability and device equivalent resistance (and, then, power consumption).
We propose a new structure for a MEMS resonator, with a vertical-like transduction mechanism, which exhibits promising features.
The vertical resonator can be fabricated with the low-cost, high performance THELMA technology, and it is designed to be efficiently frequency tunable.
With respect to the commonly investigated lateral resonators, it is expected to have lower equivalent resistances and improved large-scale repeatability characteristics.
American Psychological Association (APA)
Pomarico, A.& Morea, A.& Flora, P.& Roselli, G.& Lasalandra, E.. 2010. Vertical MEMS Resonators for Real-Time Clock Applications. Journal of Sensors،Vol. 2010, no. 2010, pp.1-5.
https://search.emarefa.net/detail/BIM-465986
Modern Language Association (MLA)
Pomarico, A.…[et al.]. Vertical MEMS Resonators for Real-Time Clock Applications. Journal of Sensors No. 2010 (2010), pp.1-5.
https://search.emarefa.net/detail/BIM-465986
American Medical Association (AMA)
Pomarico, A.& Morea, A.& Flora, P.& Roselli, G.& Lasalandra, E.. Vertical MEMS Resonators for Real-Time Clock Applications. Journal of Sensors. 2010. Vol. 2010, no. 2010, pp.1-5.
https://search.emarefa.net/detail/BIM-465986
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-465986