Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD
Joint Authors
Sung, Chien-Min
Teng, Chien-Chung
Ku, Feng-Chi
Chien, Su-Fang
Song, Shin-Min
Deng, Jin-Pei
Lin, Chhiu-Tsu
Source
Issue
Vol. 2010, Issue 2010 (31 Dec. 2010), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2010-05-17
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Engineering Sciences and Information Technology
Chemistry
Civil Engineering
Abstract EN
Four different catalysts, nanodiamond seed, nano-Ni, diamond powder, and mixture of nano-Ni/diamond powder, were used to activate Si wafers for diamond film growth by hot-filament CVD (HFCVD).
Diamond crystals were shown to grow directly on both large diamond powder and small nanodiamond seed, but a better crystallinity of diamond film was observed on the ultrasonicated nanodiamond seeded Si substrate.
On the other hand, nano-Ni nanocatalysts seem to promote the formation of amorphous carbon but suppress transpolyacetylene (t-PA) phases at the initial growth of diamond films.
The subsequent nucleation and growth of diamond crystals on the amorphous carbon layer leads to generation of the spherical diamond particles and clusters prior to coalescence into continuous diamond films based on the CH3 addition mechanism as characterized by XRD, Raman, ATR/FT-IR, XPS, TEM, SEM, and AFM techniques.
Moreover, a 36% reduction in surface roughness of diamond film assisted by nano-Ni catalyst is quite significant.
American Psychological Association (APA)
Teng, Chien-Chung& Ku, Feng-Chi& Sung, Chien-Min& Deng, Jin-Pei& Chien, Su-Fang& Song, Shin-Min…[et al.]. 2010. Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD. Journal of Nanomaterials،Vol. 2010, no. 2010, pp.1-8.
https://search.emarefa.net/detail/BIM-466269
Modern Language Association (MLA)
Teng, Chien-Chung…[et al.]. Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD. Journal of Nanomaterials No. 2010 (2010), pp.1-8.
https://search.emarefa.net/detail/BIM-466269
American Medical Association (AMA)
Teng, Chien-Chung& Ku, Feng-Chi& Sung, Chien-Min& Deng, Jin-Pei& Chien, Su-Fang& Song, Shin-Min…[et al.]. Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD. Journal of Nanomaterials. 2010. Vol. 2010, no. 2010, pp.1-8.
https://search.emarefa.net/detail/BIM-466269
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-466269