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Postannealing Effect at Various Gas Ambients on Ohmic Contacts of PtZnO Nanobilayers toward Ultraviolet Photodetectors
Joint Authors
Yao, Yeong-Der
Chen, Mao-Yi
Chao, Chung-Hua
Lin, Chii-Ruey
Yu, Yueh-Chung
Wei, Da-Hua
Source
International Journal of Photoenergy
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-12-18
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
This paper describes a fabrication and characterization of ultraviolet (UV) photodetectors based on Ohmic contacts using Pt electrode onto the epitaxial ZnO (0002) thin film.
Plasma enhanced chemical vapor deposition (PECVD) system was employed to deposit ZnO (0002) thin films onto silicon substrates, and radio-frequency (RF) magnetron sputtering was used to deposit Pt top electrode onto the ZnO thin films.
The as-deposited Pt/ZnO nanobilayer samples were then annealed at 450∘C in two different ambients (argon and nitrogen) to obtain optimal Ohmic contacts.
The crystal structure, surface morphology, optical properties, and wettability of ZnO thin films were analyzed by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), photoluminescence (PL), UV-Vis-NIR spectrophotometer, and contact angle meter, respectively.
Moreover, the photoconductivity of the Pt/ZnO nanobilayers was also investigated for UV photodetector application.
The above results showed that the optimum ZnO sample was synthesized with gas flow rate ratio of 1 : 3 diethylzinc [DEZn, Zn(C2H5)2] to carbon dioxide (CO2) and then combined with Pt electrode annealed at 450∘C in argon ambient, exhibiting good crystallinity as well as UV photo responsibility.
American Psychological Association (APA)
Chao, Chung-Hua& Chen, Mao-Yi& Lin, Chii-Ruey& Yu, Yueh-Chung& Yao, Yeong-Der& Wei, Da-Hua. 2013. Postannealing Effect at Various Gas Ambients on Ohmic Contacts of PtZnO Nanobilayers toward Ultraviolet Photodetectors. International Journal of Photoenergy،Vol. 2013, no. 2013, pp.1-9.
https://search.emarefa.net/detail/BIM-466888
Modern Language Association (MLA)
Chao, Chung-Hua…[et al.]. Postannealing Effect at Various Gas Ambients on Ohmic Contacts of PtZnO Nanobilayers toward Ultraviolet Photodetectors. International Journal of Photoenergy No. 2013 (2013), pp.1-9.
https://search.emarefa.net/detail/BIM-466888
American Medical Association (AMA)
Chao, Chung-Hua& Chen, Mao-Yi& Lin, Chii-Ruey& Yu, Yueh-Chung& Yao, Yeong-Der& Wei, Da-Hua. Postannealing Effect at Various Gas Ambients on Ohmic Contacts of PtZnO Nanobilayers toward Ultraviolet Photodetectors. International Journal of Photoenergy. 2013. Vol. 2013, no. 2013, pp.1-9.
https://search.emarefa.net/detail/BIM-466888
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-466888