The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells
Joint Authors
Kuo, Chin-guo
Huang, Chia-ho
Chou, Chia-ying
Lin, Mao-yong
Huang, Peng-cheng
Hsu, Chun-yao
Source
International Journal of Photoenergy
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-04-04
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
Molybdenum (Mo) thin films are widely used as a back contact for CIGS-based solar cells.
This paper determines the optimal settings for the sputtering parameters for an Mo thin film prepared on soda lime glass substrates, using direct current (dc) magnetron sputtering, with a metal Mo target, in an argon gas environment.
A Taguchi method with an L9 orthogonal array, the signal-to-noise ratio, and an analysis of variances is used to determine the performance characteristics of the coating operation.
The main sputtering parameters, such as working pressure (mTorr), dc power (W), and substrate temperature (°C), are optimized with respect to the structural features, surface morphology, and electrical properties of the Mo films.
An adhesive tape test is performed on each film to determine the adhesion strength of the films.
The experimental results show that the working pressure has the dominant effect on electrical resistivity and reflectance.
The intensity of the main peak (110) for the Mo film increases and the full width at half maximum decreases gradually as the sputtering power is increased.
Additionally, the application of an Mo bilayer demonstrates good adherence and low resistivity.
American Psychological Association (APA)
Huang, Peng-cheng& Huang, Chia-ho& Lin, Mao-yong& Chou, Chia-ying& Hsu, Chun-yao& Kuo, Chin-guo. 2013. The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells. International Journal of Photoenergy،Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-468361
Modern Language Association (MLA)
Huang, Peng-cheng…[et al.]. The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells. International Journal of Photoenergy No. 2013 (2013), pp.1-8.
https://search.emarefa.net/detail/BIM-468361
American Medical Association (AMA)
Huang, Peng-cheng& Huang, Chia-ho& Lin, Mao-yong& Chou, Chia-ying& Hsu, Chun-yao& Kuo, Chin-guo. The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells. International Journal of Photoenergy. 2013. Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-468361
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-468361