Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices
Joint Authors
Triscone, J.-M.
Isarakorn, D.
Torres-Pardo, A.
Janphuang, Pattanaphong
Gariglio, S.
Reiner, J. W.
Sambri, A.
Stéphan, O.
de Rooij, Nico F.
Briand, D.
Ahn, C. H.
Source
Issue
Vol. 2012, Issue 2012 (31 Dec. 2012), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2012-04-22
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
We report on the properties of ferroelectric Pb(Zr0.2Ti0.8)O3 (PZT) thin films grown epitaxially on (001) silicon and on the performance of such heterostructures for microfabricated piezoelectric energy harvesters.
In the first part of the paper, we investigate the epitaxial stacks through transmission electron microscopy and piezoelectric force microscopy studies to characterize in detail their crystalline structure.
In the second part of the paper, we present the electrical characteristics of piezoelectric cantilevers based on these epitaxial PZT films.
The performance of such cantilevers as vibration energy transducers is compared with other piezoelectric harvesters and indicates the potential of the epitaxial approach in the field of energy harvesting devices.
American Psychological Association (APA)
Sambri, A.& Isarakorn, D.& Torres-Pardo, A.& Gariglio, S.& Janphuang, Pattanaphong& Briand, D.…[et al.]. 2012. Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices. Smart Materials Research،Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-471239
Modern Language Association (MLA)
Sambri, A.…[et al.]. Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices. Smart Materials Research No. 2012 (2012), pp.1-7.
https://search.emarefa.net/detail/BIM-471239
American Medical Association (AMA)
Sambri, A.& Isarakorn, D.& Torres-Pardo, A.& Gariglio, S.& Janphuang, Pattanaphong& Briand, D.…[et al.]. Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices. Smart Materials Research. 2012. Vol. 2012, no. 2012, pp.1-7.
https://search.emarefa.net/detail/BIM-471239
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-471239