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Tensorial Model for Photolithography Aerial Image Simulation
Joint Authors
Di Giacomo, Antonio
Fossati, Caroline
Sabatier, Romuald
Bourennane, Salah
Source
Issue
Vol. 2009, Issue 2009 (31 Dec. 2009), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2009-12-07
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
In this paper, we propose to adapt the multilinear algebra tools to the tensor of Transmission Cross-Coefficients (TCC) values for aerial image simulation in order to keep the data tensor as a whole entity.
This new approach implicitly extends the singular value decomposition (SVD) to tensors, that is, Higher Order SVD or TUCKER3 tensor decomposition which is used to obtain lower rank-(K1, K2, K3, K4) tensor approximation (LRTA (K1, K2, K3, K4)).
This model requires an Alternating Least Square (ALS) process known as TUCKALS3 algorithm.
The needed number of kernels is estimated using two adapted criteria, well known in signal processing and information theory.
For runtime improvement, we use the fixed point algorithm to calculate only the needed eigenvectors.
This new approach leads to a fast and accurate algorithm to compute aerial images.
American Psychological Association (APA)
Fossati, Caroline& Bourennane, Salah& Sabatier, Romuald& Di Giacomo, Antonio. 2009. Tensorial Model for Photolithography Aerial Image Simulation. Advances in OptoElectronics،Vol. 2009, no. 2009, pp.1-9.
https://search.emarefa.net/detail/BIM-473054
Modern Language Association (MLA)
Fossati, Caroline…[et al.]. Tensorial Model for Photolithography Aerial Image Simulation. Advances in OptoElectronics No. 2009 (2009), pp.1-9.
https://search.emarefa.net/detail/BIM-473054
American Medical Association (AMA)
Fossati, Caroline& Bourennane, Salah& Sabatier, Romuald& Di Giacomo, Antonio. Tensorial Model for Photolithography Aerial Image Simulation. Advances in OptoElectronics. 2009. Vol. 2009, no. 2009, pp.1-9.
https://search.emarefa.net/detail/BIM-473054
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-473054