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Wideband Lithium Niobate FBAR Filters
Joint Authors
Fan, Ji
Ballandras, Sylvain
Chatras, Matthieu
Catherinot, Lise
Bassignot, Florent
Monfraix, Philippe
Wang, Haixia
Lebrasseur, Eric
Estagerie, Laetitia
Baron, Thomas
Source
International Journal of Microwave Science and Technology
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-02-26
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
Filters based on film bulk acoustic resonators (FBARs) are widely used for mobile phone applications, but they can also address wideband aerospace requirements.
These devices need high electromechanical coupling coefficients to achieve large band pass filters.
The piezoelectric material LiNbO3 complies with such specifications and is compatible with standard fabrication processes.
In this work, simple metal—LiNbO3—metal structures have been developed to fabricate single FBAR elements directly connected to each other on a single chip.
A fabrication process based on LiNbO3/silicon Au-Au bonding and LiNbO3 lapping/polishing has been developed and is proposed in this paper.
Electrical measurements of these FBAR filters are proposed and commented exhibiting filters with 8% of fractional bandwidth and 3.3 dB of insertion losses.
Electrical measurements show possibilities to obtain 14% of fractional bandwidth.
These devices have been packaged, allowing for power handling, thermal, and ferroelectric tests, corresponding to spatial conditions.
American Psychological Association (APA)
Baron, Thomas& Lebrasseur, Eric& Bassignot, Florent& Wang, Haixia& Ballandras, Sylvain& Fan, Ji…[et al.]. 2013. Wideband Lithium Niobate FBAR Filters. International Journal of Microwave Science and Technology،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-473257
Modern Language Association (MLA)
Baron, Thomas…[et al.]. Wideband Lithium Niobate FBAR Filters. International Journal of Microwave Science and Technology No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-473257
American Medical Association (AMA)
Baron, Thomas& Lebrasseur, Eric& Bassignot, Florent& Wang, Haixia& Ballandras, Sylvain& Fan, Ji…[et al.]. Wideband Lithium Niobate FBAR Filters. International Journal of Microwave Science and Technology. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-473257
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-473257