Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing
Joint Authors
Marques, P.
Santos, José Luís
Johnson, E. G.
Mayeh, M.
Farahi, Faramarz
Viegas, J.
Srinivasan, P.
Source
Issue
Vol. 2009, Issue 2009 (31 Dec. 2009), pp.1-11, 11 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2009-07-26
Country of Publication
Egypt
No. of Pages
11
Main Subjects
Abstract EN
We present optical sensors based on slotted multimode interference waveguides.
The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials.
The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals.
Sensors made with this technology are suited to high volume manufacturing.
American Psychological Association (APA)
Mayeh, M.& Viegas, J.& Srinivasan, P.& Marques, P.& Santos, José Luís& Johnson, E. G.…[et al.]. 2009. Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing. Journal of Sensors،Vol. 2009, no. 2009, pp.1-11.
https://search.emarefa.net/detail/BIM-474035
Modern Language Association (MLA)
Mayeh, M.…[et al.]. Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing. Journal of Sensors No. 2009 (2009), pp.1-11.
https://search.emarefa.net/detail/BIM-474035
American Medical Association (AMA)
Mayeh, M.& Viegas, J.& Srinivasan, P.& Marques, P.& Santos, José Luís& Johnson, E. G.…[et al.]. Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing. Journal of Sensors. 2009. Vol. 2009, no. 2009, pp.1-11.
https://search.emarefa.net/detail/BIM-474035
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-474035
