Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance
Joint Authors
Wang, Hong Jun
Fu, De Jun
Tian, Can Xin
He, Jun
Yang, Bing
Source
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2010-09-05
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Engineering Sciences and Information Technology
Chemistry
Civil Engineering
Abstract EN
CrNx coatings were deposited on Si (100) and WC-Co substrates by a home-made medium-frequency magnetron sputtering system with and without thermal filament ion source assistance.
The structure and composition of the coatings were characterized by X-ray diffraction, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy.
The mechanical and tribological properties were assessed by microhardness and pin-on-disc testing.
The ion source-assisted system showed a deposition rate of 3.88 μm/h, much higher than the value 2.2 μm/h without ion source assistance.
The CrNx coatings prepared with ion source assistance exhibited an increase in microhardness (up to 16.3 GPa) and adecrease in friction coefficient (down to 0.48) at the optimized cathode source-to-substrate distance.
American Psychological Association (APA)
Tian, Can Xin& Yang, Bing& He, Jun& Wang, Hong Jun& Fu, De Jun. 2010. Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance. Journal of Nanomaterials،Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-479378
Modern Language Association (MLA)
Tian, Can Xin…[et al.]. Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance. Journal of Nanomaterials No. 2011 (2011), pp.1-7.
https://search.emarefa.net/detail/BIM-479378
American Medical Association (AMA)
Tian, Can Xin& Yang, Bing& He, Jun& Wang, Hong Jun& Fu, De Jun. Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance. Journal of Nanomaterials. 2010. Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-479378
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-479378