Static and Motional Feedthrough Capacitance of Flexural Microresonator
Author
Source
Active and Passive Electronic Components
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-10-13
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
The present paper evaluates the static and motional feedthrough capacitance of a silicon carbide-based flexural-mode microelectromechanical system resonator.
The static feedthrough capacitance was measured by a network analyzer under atmospheric pressure.
The motional feedthrough was obtained by introducing various values into the modeling circuit in order to fit the Bode plots measured under reduced pressure.
The static feedthrough capacitance was 0.02 pF, whereas the motional feedthrough capacitance of an identical device was about 0.2 pF, which is one order of magnitude larger than the static feedthrough capacitance.
American Psychological Association (APA)
Chang, Wen-Teng. 2011. Static and Motional Feedthrough Capacitance of Flexural Microresonator. Active and Passive Electronic Components،Vol. 2011, no. 2011, pp.1-6.
https://search.emarefa.net/detail/BIM-480418
Modern Language Association (MLA)
Chang, Wen-Teng. Static and Motional Feedthrough Capacitance of Flexural Microresonator. Active and Passive Electronic Components No. 2011 (2011), pp.1-6.
https://search.emarefa.net/detail/BIM-480418
American Medical Association (AMA)
Chang, Wen-Teng. Static and Motional Feedthrough Capacitance of Flexural Microresonator. Active and Passive Electronic Components. 2011. Vol. 2011, no. 2011, pp.1-6.
https://search.emarefa.net/detail/BIM-480418
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-480418